Supercritical Die & 1" Wafer MEMS Release Tool

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Autosamdri®-815, Series B

Automatic Supercritical Point Dryer
Process 5 x 10mm sq. die or 5 x 1" diameter wafers
Clean Room Compatible

tousimis catalog# 8779C

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Click here for the Autosamdri®-815, Series B Operational Demo
Observe sample operation of Autosamdri®-815, Series B with HF compatible wafer / chip holders

The Supercritical Autosamdri®-815, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.
Smooth operation and precise control are the Supercritical Autosamdri®-815's trademark; allowing anti-stiction processing of 10mm square die as well as 1" wafers.

* Most Samdri®, Autosamdri® and Automegasamdri® feature U.S. patents (#6,493,964, #6,678,968) or patents pending.
Note: Actual delivered model or accessories may vary slightly, as advancements are being applied constantly.

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