Supercritical 6" Wafer MEMS Release Tool

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Automegasamdri®-915B, Series B

Automatic Supercritical Point Dryer
Process 5 wafers up to 6" in diameter
Clean Room Compatible

tousimis catalog# 8785C

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Click here for the Automegasamdri®-915B, Series B Operational Demo
Observe sample operation of Automegasamdri®-915B, Series B with HF compatible wafer / chip holders

The Supercritical Automegasamdri®-915B, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.
Smooth operation and precise control are the Supercritical Automegasamdri®-915B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 6", 4", 3", 2" wafers or 10mm square die per process run!

* Most Samdri®, Autosamdri® and Automegasamdri® feature U.S. patents (#6,493,964, #6,678,968) or patents pending.
Note: Actual delivered model or accessories may vary slightly, as advancements are being applied constantly.

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