Supercritical 6" Wafer MEMS Release Tool

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Automegasamdri®-915B, Series C

Low LCO2 Consumption.
Auto-Process up to 5 - 6" wafers in Less than 1 hour.
Small Foot Print design.
Minimal Facility Utility Requirements.
Unique Patented Features.

tousimis catalog# 8785D

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Click here for the Automegasamdri®-915B, Series C Operational Demo
Observe sample operation of Automegasamdri®-915B, Series C with HF compatible wafer / chip holders

The Automegasamdri®-915B, Series C maintains tousimis® process quality and achieves a small facility foot print by utilizing an efficient "closed loop refrigeration and waste alcohol collection" engineered design.*
35 years of tousimis® CPD experience enables smooth operation and precise control. HF Compatible Wafer Holders* and Chamber Inserts* are provided allowing anti-stiction MEMS processing of various wafer sizes and die.

* Most Samdri®, Autosamdri® and Automegasamdri® feature U.S. patents (#6,493,964, #6,678,968) or patents pending.
Note: Actual delivered model or accessories may vary slightly, as advancements are being applied constantly.

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