Supercritical 8" Wafer MEMS Release Tool

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Automegasamdri®-916B, Series C

Low LCO2 Consumption.
Auto-Process up to 5 - 8" wafers in Less than 1 hour.
Small Foot Print design.
Minimal Facility Utility Requirements.
Unique Patented Features.

tousimis catalog# 8786D

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Click here for the Automegasamdri®-916B, Series C Operational Demo
Observe sample operation of Automegasamdri®-916B, Series C with HF compatible wafer / chip holders

The New Supercritical Automegasamdri®-916B, Series C System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.
Smooth operation and precise control are the Supercritical Automegasamdri®-916B's trademark; wafer holders and inserts are provided that allow flexible CPD processing of 8", 6", 4", 3", 2" wafers as well as 10mm square die.

* Most Samdri®, Autosamdri® and Automegasamdri® feature U.S. patents (#6,493,964, #6,678,968) or patents pending.
Note: Actual delivered model or accessories may vary slightly, as advancements are being applied constantly.

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