MEMS Application Images
Freestanding Cantilever
Processed by Autosamdri®-815B, Series C
Quantum NanoFab, University of Waterloo (Mary Gopanchuk and Nathan Nelson-Fitzpatrick)
Freestanding Cantilever
Processed by Autosamdri®-815B, Series C
Quantum NanoFab, University of Waterloo (Mary Gopanchuk and Nathan Nelson-Fitzpatrick)
Released cantilevers after thermal annealing
Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)
Released cantilevers after thermal annealing
Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)
Thermal Actuated Actuators
Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)
Thermal Actuated Actuators
Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)
A flow sensor fabricated using the process flow
Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)
MEMS Shock Sensor
Processed by Autosamdri®-815B, Series B
Naval Surface Warfare Center Indian Head, MD (Daniel Jean, Ph.D.)
MEMS Shock Sensor (Multi-level)
Processed by Autosamdri®-815B, Series B
Naval Surface Warfare Center Indian Head, MD (Daniel Jean, Ph.D.)
MEMS Shock Sensor (Multi-Directional)
Processed by Autosamdri®-815B, Series B
Naval Surface Warfare Center Indian Head, MD (Daniel Jean, Ph.D.)
High aspect ratio silicon gratings
Processed by Autosamdri®-815B, Series B
Massachusetts Institute of Technology (Minseung Ahn)
High aspect ratio silicon gratings
Processed by Autosamdri®-815B, Series B
Massachusetts Institute of Technology (Minseung Ahn)
Solderfan
Processed by Automegasamdri®-915B, Series B
ETH, Switzerland (Ryan Linderman)
Rotary Microfan with Rotary Motor
Processed by Automegasamdri®-915B, Series B
ETH, Switzerland (Ryan Linderman)
Rotary Motor
Processed by Automegasamdri®-915B, Series B
ETH, Switzerland (Ryan Linderman)
Magnetic Resonance Force Microscope
Processed by Automegasamdri®-915B, Series B
Korea Research Institute of Standards and Science (KRISS), Korea (Jae-Hyuk Choi, Ph. D.)
SEM View of Coupled Oscillators Made of Low Stress Silicon Nitride. 300x
Processed by Automegasamdri®-915B, Series B
Cornell Nanoscale Facility and Department of Applied Physics, USA (Rob Ilic and H.G. Craighead - Craighead Group)
View of Single Coupled Oscillator Made Out of Low Stress Silicon Nitride. 800x
Processed by Automegasamdri®-915B, Series B
Cornell Nanoscale Facility and Department of Applied Physics, USA (Rob Ilic and H.G. Craighead - Craighead Group)
Array of low stress silicon nitride coupled oscillators with gold actuation leads. 1,100x
Processed by Automegasamdri®-915B, Series B
Cornell Nanoscale Facility and Department of Applied Physics, USA (Rob Ilic and H.G. Craighead - Craighead Group)
MEMS Based Resonant Device
Processed by Automegasamdri®-915B, Series B
Cornell Nanoscale Facility and Department of Applied Physics, USA (Rob Ilic and H.G. Craighead - Craighead Group)
Electrostatic Actuator
Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)
Resistive IR Emitter Device
Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)
ARTIFICIAL EYELID ACTUATOR
Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)
ARTIFICIAL EYELID ACTUATOR
Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)
ARTIFICIAL EYELID ACTUATOR
Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)
MEMS Electrostatic Comb Drive
Processed by Automegasamdri®-915B, Series B
MEMX, New Mexico, USA ()
MEMS Electrostatic Actuator
Processed by Automegasamdri®-915B, Series B
MEMX, New Mexico, USA ()
RF MEMS Device
Processed by Automegasamdri®-915B, Series B
Middle East Technical University, Turkey (Tayfun Akin)
RF MEMS Device
Processed by Automegasamdri®-915B, Series B
Middle East Technical University, Turkey (Tayfun Akin)
RF MEMS Capacitive Switch
Processed by Automegasamdri®-915B, Series B
NASA-Glenn Research Center/Communications Technology Division, USA (Tayfun Akin)
RF MEMS Capacitive Switch
Processed by Automegasamdri®-915B, Series B
NASA-Glenn Research Center/Communications Technology Division, USA (Tayfun Akin)
E-beam resist pattern quality after CPD Process
Processed by Autosamdri®-815B, Series C
NRL Nano Fab - Washingtopn, DC (Chul-Soo Kim)
E-beam resist pattern quality after CPD Process
Processed by Autosamdri®-815B, Series C
NRL Nano Fab - Washingtopn, DC (Chul-Soo Kim)
Silicon Microrobots - Elbow hinge
Processed by Autosamdri®-815B, Series B
University of California at Berkeley and Micropropulsion Corp. USA (Seth Hollar and Anita Flynn Daniel Jean, Ph.D.)
Silicon Microrobots - Leg of Robot
Processed by Autosamdri®-815B, Series B
University of California at Berkeley and Micropropulsion Corp. USA (Seth Hollar and Anita Flynn Daniel Jean, Ph.D.)
B Lock & Stepper
Processed by Automegasamdri®-915B, Series B
University of California at Los Angeles (Professor William Kaiser)
MEMSJet Drop Ejector
Processed by Automegasamdri®-915B, Series B
XEROX CORPORATION, USA (Joel A. Kubby)
Mechanical Cantilevers
Processed by Autosamdri®-815B, Series B
University of Edinburgh, UK (Stefan Enderling)
Tiltable Microplatform
Processed by Automegasamdri®-915B, Series B
University of Michigan at Ann Arbor, Department of Engineering (Yuan Xie, Ph.D.)
Resonator
Processed by Automegasamdri®-915B, Series B
VTT Technologies, Finland (Jyrki Kiihamaki, Senior Research Scientist)
A Sensor for Acoustic Emission
Processed by Automegasamdri®-915B, Series B
VTT Technologies, Finland (Jyrki Kiihamaki, Senior Research Scientist)