Applications
The Samdri® line of Supercritical Point Dryers is successfully used to increase yield and uniformity of MEMS devices. Liquid carbon dioxide is the transitional fluid used to process your delicate MEMS. The tousimis Samdri® line of Supercritical Point Drying tools used for the MEMS CO2 dry release after wet etching is a most beneficial anti-stiction tool for the MEMS fab.

Autosamdri®-934

     

Touchscreen Series C for 4" Wafers

  • Process up to 4" wafers
  • Touchscreen Control Programmable Interface
  • Previous Run Data Review
  • Low LCO2 Consumption
  • Small Foot Print design
  • Made in U.S.A.
tousimis catalog# 8788A

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Automegasamdri®-936

     

Touchscreen Series C for 6" Wafers

  • Process up to 6" wafers
  • Touchscreen Control Programmable Interface
  • Previous Run Data Review
  • Low LCO2 Consumption
  • Small Foot Print design
  • Made in U.S.A.
tousimis catalog# 8788B

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Automegasamdri®-938

     

Touchscreen Series C for 8" Wafers

  • Process up to 8" wafers
  • Touchscreen Control Programmable Interface
  • Previous Run Data Review
  • Low LCO2 Consumption
  • Small Foot Print design
  • Made in U.S.A.
tousimis catalog# 8788C

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Autosamdri®-931

     

Advanced Digital Multi-application Dryer

  • Patent Pending "Stasis Software" for Challenging Sample Types
  • Available in 1.25", 2.50" and 3.40" chamber sizes
  • Winner of 2012 Microscopy Today Innovation Award
  • Built-in Internal Condenser
  • Delicate Slow Fill Path Through for Delicate Samples
  • Precision process control
  • Internal Filtration System Down to 0.08µm
  • Optional "Quick Release" sample holder (down to 2 µm in size)
  • Program and save custom recipes
  • Made in U.S.A.

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  • Process up to 5 x 1" wafers
  • Automatic Supercritical Point Dryer
  • Minimal Facility Utility Requirements
  • Filtration down to 0.08µm
  • Made in U.S.A.
tousimis catalog# 8779C

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  • Process up to 5 x 4" wafers
  • Automatic Supercritical Point Dryer
  • Minimal Facility Utility Requirements
  • Filtration down to 0.08µm
  • Made in U.S.A.
tousimis catalog# 8780C

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  • Process up to 5 x 6" wafers
  • Automatic Supercritical Point Dryer
  • Minimal Facility Utility Requirements
  • Filtration down to 0.08µm
  • Made in U.S.A.
tousimis catalog# 8785C

More Information

Application Images

Freestanding Cantilever Quantum NanoFab, University of Waterloo

ARTIFICIAL EYELID ACTUATOR MCNC

Freestanding Cantilever Quantum NanoFab, University of Waterloo

RF MEMS Device Middle East Technical University, Turkey

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Upcoming Exhibitions and Conferences

We are pleased to invite you to MEMS 2018 
 

Booth # 22

Date: January 21-25, 2016

Location: Belfast Waterfront, Belfast, Northern Ireland