Thermal Actuated Actuators Universite Catholique de Louvain
Mechanical Cantilevers University of Edinburgh, UK
Released cantilevers after thermal annealing Universite Catholique de Louvain
MEMS Electrostatic Comb Drive MEMX, New Mexico, USA
Date: May 18-19, 2024
Location: Yancheng Guest House (No.1 Tianshan Road), Tinghu District, Yancheng City, China