Autosamdri®-931 - Cleanroom Versions

Applications
931 Series

CPD Multi-Applications

Application Images

Tiltable Microplatform University of Michigan at Ann Arbor, Department of Engineering

RF MEMS Capacitive Switch NASA-Glenn Research Center/Communications Technology Division, USA

Inverse Opal California Institute of Technology, Materials Science and Mechanics

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Cleanroom vs Non-Cleanroom

FEATURES
  • Cleanroom Material Fabricated Static Free Design
  • Bright LCD Touchscreen Control
  • Default "Automode" setting suitable for most wafer and die MEMS applications
  • Process up to 5 substrates per process run (either Wafers or Die)
  • HF Compatible Holder(s) included with system (see Chamber Size Options below)
  • Create and save custom Recipes exactly for your specific sample needs
  • Easy View Placement of Micro Metering Valves with Vernier Handles
  • Slow Fill feature protects the most delicate samples
  • Fast adiabatic chamber cooling (Less than one minute for the 1.25" chamber)
  • Maintenance Free Non-Mechanical Vortex Swirl™ Purge Stirring
  • External 0.5µm Post-Purge filter access for easy preventive maintenance
  • External LCO2 tank supply particulate filtration using 'Double T-Filter' design with 99.5%+ retention
  • Internal filtration delivers filtered LCO2 down to 0.08µm with 99.999+% retention directly into process chamber
  • Internal SOTER™ Condenser quietly separates waste alcohol and CO2 while eliminating any freeze up or static discharge
  • EZ top loading process chamber with LED illumination
  • "Stasis Software" for drying GELS and other challenging sample types
  • Post Process Previous Run Data Review
  • All components meet CE, UL and/or U.S. Military specifications
  • 2 year warranty on all parts and labor
  • Made in U.S.A.
SPECIFICATIONS
  • Cabinet: (W) 15.0" (38.0cm) x (H) 13.25" (33.5cm) x (D) 20" (50.8cm)
  • System Set-Up Area Required: (W) 24" (61cm) x (D) 22" (56cm)
  • Chamber Size (Available in three sizes):
    • 1.25" ID x 1.25" Depth (31.75mm ID x 31.75mm Depth) - 25 ml Volume
    • 2.50" ID x 1.25" Depth (63.50mm ID x 31.75mm Depth) - 100 ml Volume
    • 3.40" ID x 1.25" Depth (86.36mm ID x 31.75mm Depth) - 186 ml Volume
  • Pressure Gauge Range: 0- 2000 psi, Temperature Range - 30°C to 60°C
  • 120V or 220V Models Available
STANDARD ACCESSORIES
  • Flexible High-Pressure LCO2 Supply Hose, 10ft (3.0m)
    Note: Other lengths available upon request up to 50ft (15m)
  • HF Compatible Substrate Holders included (see Chamber Size Options below)
  • Chamber insert included for 2.50" chamber and 3.40" chamber to reduce the chamber size down to 1.25"
  • Double T-Filter Assembly (#8785) pre-installed onto the LCO2 high-pressure hose. LCO2 filtered twice thru 0.5µm filters prior to LCO2 entering Autoamdri®-931 process chamber
  • Static Free Exhaust Tubing
  • Flow Meter supplied allows precise BLEED Exhaust Calibration
  • Spare chamber O-rings (2), LED chamber lamp (1), and 5A slo-blow fuses (2)
  • User Manual and Check-Out Data Sheet
  • Installation Tool Kit
  • Free lifetime technical support
OPTIONAL ACCESSORIES
For all Autosamdri®-931
  • 8760-40: 5 AMP FUSE for SAMDRI® and Autosamdri®
  • 8770-13: LED CHAMBER LAMP for SAMDRI® and Autosamdri® (120V/60Hz)
  • 8770-33: HIGH-PRESSURE HOSE, 10ft
  • 8770-HPS: HIGH-PRESSURE HOSE - Custom lengths available upon request
  • 8785: Double T-Filter Assembly
  • 8784-05: Gasket for LCO2 Tank Connect
  • 8770-83B: 0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter
  • 8770-53: POWER CABLE
  • 8770-54: LCO2 TANK SCALE W/ REMOTE READOUT
  • 8770-94: Carboy, 1 gal capacity with 2 quick connect 1/4" hose barbs
  • 8770-95: Carboy, 2.5 gal capacity with 2 quick connect 1/4" hose barbs
For all Autosamdri®-931 with 1.25in Chamber
  • 8770-51/T: Teflon® O-Ring for 1.25" Chamber I.D. for Autosamdri®-931 (Cleanroom version)
  • 8770-45: Flow Meter - Use with any 1.25" dia. Samdri® Chamber (20 SCFH)
For all Autosamdri®-931 with 2.5in Chamber
  • 8770-51/S25T: Teflon® O-Ring for Autosamdri®-931 with 2.50" I.D. Chamber (Cleanroom version)
  • 8770-51/S25T-BR: Backing Ring for 2.50" Chamber I.D.
  • 8770-46: Flow Meter - Use with any 2.50", 3.40" and 4.0" dia. Autosamdri® Chamber (60 SCFH)
For all Autosamdri®-931 with 3.4in Chamber
  • 8770-51/S34T: Teflon® O-Ring for 3.40" Chamber I.D.
  • 8770-51/S34T-BR: Backing Ring for 3.40" Chamber I.D.
  • 8770-46: Flow Meter - Use with any 2.50", 3.40" and 4.0" dia. Autosamdri® Chamber (60 SCFH)
CPD MULTI-APPLICATIONS

Chamber Size Options

 

                                                   

3.40" Chamber

Cat.# 8787F

2.50" Chamber

Cat.# 8787E

1.25" Chamber

Cat.# 8787D

Autosamdri®-931 - 1.25" Chamber

1.25" Chamber Size
1.25" Chamber with a 10mm Square HF Compatible Chip Holder

Autosamdri®-931 - 2.50" Chamber

2.50" Chamber Size
2.50" Chamber with a 2" (50mm) HF Compatible Wafer Holder
2.50" Chamber with a Chamber Insert
2.50" Chamber with a Chamber Insert and a 10mm Square HF Compatible Chip Holder

Autosamdri®-931 - 3.40" Chamber

3.40" Chamber with a 1" (25mm) HF Compatible Wafer Holder and a 10mm Square HF Compatible Chip Holder
3.40" Chamber with a 2" (50mm) HF Compatible Wafer Holder
3.40" Chamber with a 10mm Square HF Compatible Chip Holder
3.40" Chamber with a chamber insert
3.40" Chamber with a chamber insert and a 10mm Square HF Compatible Chip Holder