MEMS Electrostatic Actuator MEMX, New Mexico, USA

SEM View of Coupled Oscillators Made of Low Stress Silicon Nitride. 300x Cornell Nanoscale Facility and Department of Applied Physics, USA

View of Single Coupled Oscillator Made Out of Low Stress Silicon Nitride. 800x Cornell Nanoscale Facility and Department of Applied Physics, USA

Resonator VTT Technologies, Finland